Furnace Structure
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The furnace consists of 16 small tube furnace modules with quartz tube 25 mm O.D. x 20 mm I.D. x 200 mm L
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Each heating module's temperature is controlled independently up to 1200°C
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Quick seal flange, vacuum gauge, and flow meter are installed to allows heat treatment under vacuum or flowing gas
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Processing 16 samples with different temperatures at compact space
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The furnace system consists of two units: a furnace heating modules and a power control unit
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The furnace can rock at variable speed
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Power & Working Voltage |
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AC 220V +/- 10% , single-phase, 50/60Hz
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Maximum power 13 KW
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Note: Power cable included but without a plug. Please install a plug on your own. You may purchase a plug from your local hardware store or browse our catalog for a compatible plug
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Rocking Stage |
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16 furnaces are driven by the heavy-duty motor to swing
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Rocking angle: -15º to +15º
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Rocking frequency: 50/min (25 cycles/min), 1 cycle is -15º to +15º
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Working Temperature
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Continuous Working Temperature 1000°C
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Maximum Working Temperature 1100°C (< 1 hrs)
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Temperature accuracy: ±1 °C
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Constant temperature zone:
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+/- 2°C within center 20 mm cubic zone
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+/- 5°C within center 55 mm cubic zone
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Processing Tubes
& Flanges |
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16 pieces of High purity Quartz tube with 25 mm O.D. x 20 mm I.D. x 200 mm L are included
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16 pairs of SS304 Quickly clamped flange with 1/8 gas inlet and outlet, as well as vacuum ports are built-in
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16 pairs of needle valves are designed for gas inlet and outlet for gas flow control
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16 vacuum ports in the back could be connected to the vacuum pump via 16 to 1 adaptor
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Only one vacuum pump required via a KF25 port.
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Max. Vacuum 10^-2 torr by a mechanical pump and 10^-5 torr by turbopump
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Temperature Control |
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16 channel heating tube is controlled independently by 30 segments programmable temperature controller
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16 K-type Thermal Couples
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6" Touch screen panel to set heating programs
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RS484 port is built-ing and software is optional for PC operation
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Heating Rate |
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Heating Element |
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Compliance
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CE Certified
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NRTL (UL61010) or CSA certification is available at an extra cost
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Warranty |
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One year limited warranty with lifetime support
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We reserve the right to upgrade the furnace structure for better performance without notice
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Dimension |
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Furnace Unit: 1,850 mm x 700 mm x 1,770 mm
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Power Control Unit: 900 mm x 650 mm x 1,460 mm
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Warning & Note |
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Max pressure of this furnace is 7.5 PSI (0.5 atm). You must install a pressure regulator on your gas tank to avoid over-pressured.
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This furnace also can be modified as a larger CVD furnace system with the proper gas delivery system. Please contact us to discuss your special application
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